EUV Ellipsometry on Mo/Si Multilayers
نویسندگان
چکیده
منابع مشابه
on Characterization of metal / dielectric multilayers with in - situ ellipsometry
The project was completed on 31 December 2010. In this project, we did simulations for metal/dielectric multilayer structures, their applications as hyperlens for sub-wavelength imaging with resolution beyond diffraction limit, optimized metal (silver) films and started fabrication and characterization of dielectric films with in-situ ellipsometry monitoring the thickness and optical constants....
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2013
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/425/15/152011